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An a posteriori Error Estimate for Scanning Electron Microscope Simulation with Adaptive Mesh Refinement
The intensity variation in a scanning electron microscope is a complex function of sample topography and composition. Measurement accuracy is improved when an explicit accounting for the relationship between signal and measurand is made. Because the determinants of the signal are many, the theoretic...
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| Veröffentlicht in: | J Sci Comput |
|---|---|
| Hauptverfasser: | , |
| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
2019
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| Schlagworte: | |
| Online Zugang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7067220/ https://ncbi.nlm.nih.gov/pubmed/32165785 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1007/s10915-019-00995-2 |
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