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An a posteriori Error Estimate for Scanning Electron Microscope Simulation with Adaptive Mesh Refinement

The intensity variation in a scanning electron microscope is a complex function of sample topography and composition. Measurement accuracy is improved when an explicit accounting for the relationship between signal and measurand is made. Because the determinants of the signal are many, the theoretic...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Veröffentlicht in:J Sci Comput
Hauptverfasser: Mitchell, William F., Villarrubia, John S.
Format: Artigo
Sprache:Inglês
Veröffentlicht: 2019
Schlagworte:
Online Zugang:https://ncbi.nlm.nih.gov/pmc/articles/PMC7067220/
https://ncbi.nlm.nih.gov/pubmed/32165785
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1007/s10915-019-00995-2
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