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Recent Progress of Miniature MEMS Pressure Sensors
Miniature Microelectromechanical Systems (MEMS) pressure sensors possess various merits, such as low power consumption, being lightweight, having a small volume, accurate measurement in a space-limited region, low cost, little influence on the objects being detected. Accurate blood pressure has been...
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| 出版年: | Micromachines (Basel) |
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| 主要な著者: | , , , , , , , , |
| フォーマット: | Artigo |
| 言語: | Inglês |
| 出版事項: |
MDPI
2020
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| 主題: | |
| オンライン･アクセス: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7020044/ https://ncbi.nlm.nih.gov/pubmed/31906297 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi11010056 |
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