Recent Progress of Miniature MEMS Pressure Sensors

Miniature Microelectromechanical Systems (MEMS) pressure sensors possess various merits, such as low power consumption, being lightweight, having a small volume, accurate measurement in a space-limited region, low cost, little influence on the objects being detected. Accurate blood pressure has been...

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Bibliographische Detailangaben
Hauptverfasser: Peishuai Song, Zhe Ma, Jing Ma, Liangliang Yang, Jiangtao Wei, Yongmei Zhao, Mingliang Zhang, Fuhua Yang, Xiaodong Wang
Format: Artigo
Sprache:Inglês
Veröffentlicht: MDPI AG 2020-01-01
Schriftenreihe:Micromachines
Schlagworte:
pressure sensor
mems
graphene
piezoresistive
resonant pressure sensor
capacitive pressure sensor
optical fiber pressure sensor
piezoelectric pressure sensor
implantable pressure sensor
blood pressure
intraocular pressure
intracranial pressure
Online Zugang:https://www.mdpi.com/2072-666X/11/1/56
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