The Recent Progress of MEMS/NEMS Resonators

MEMS/NEMS resonators are widely studied in biological detection, physical sensing, and quantum coupling. This paper reviews the latest research progress of MEMS/NEMS resonators with different structures. The resonance performance, new test method, and manufacturing process of single or double-clampe...

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Dades bibliogràfiques
Publicat a:Micromachines (Basel)
Autors principals: Wei, Lei, Kuai, Xuebao, Bao, Yidi, Wei, Jiangtao, Yang, Liangliang, Song, Peishuai, Zhang, Mingliang, Yang, Fuhua, Wang, Xiaodong
Format: Artigo
Idioma:Inglês
Publicat: MDPI 2021
Matèries:
Review
Accés en línia:https://ncbi.nlm.nih.gov/pmc/articles/PMC8235191/
https://ncbi.nlm.nih.gov/pubmed/34205469
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi12060724
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