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The Recent Progress of MEMS/NEMS Resonators
MEMS/NEMS resonators are widely studied in biological detection, physical sensing, and quantum coupling. This paper reviews the latest research progress of MEMS/NEMS resonators with different structures. The resonance performance, new test method, and manufacturing process of single or double-clampe...
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| Publicado no: | Micromachines (Basel) |
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| Main Authors: | , , , , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2021
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC8235191/ https://ncbi.nlm.nih.gov/pubmed/34205469 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi12060724 |
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