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High-Speed and Direction-Controlled Formation of Silicon Nanowire Arrays Assisted by Electric Field

Metal-assisted chemical etching (MaCE), a low-cost and versatile method was considered a promising technique for preparing silicon nanowires (SiNWs), yet the lack of well controlling the injected holes within Si might reduce the etching rate, create the unwanted sidewall etching, and degrade the str...

詳細記述

保存先:
書誌詳細
出版年:Nanoscale Res Lett
主要な著者: Chien, Pin-Ju, Wei, Ta-Cheng, Chen, Chia-Yun
フォーマット: Artigo
言語:Inglês
出版事項: Springer US 2020
主題:
オンライン・アクセス:https://ncbi.nlm.nih.gov/pmc/articles/PMC6990330/
https://ncbi.nlm.nih.gov/pubmed/32002703
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/s11671-020-3259-5
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