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High-Speed and Direction-Controlled Formation of Silicon Nanowire Arrays Assisted by Electric Field

Metal-assisted chemical etching (MaCE), a low-cost and versatile method was considered a promising technique for preparing silicon nanowires (SiNWs), yet the lack of well controlling the injected holes within Si might reduce the etching rate, create the unwanted sidewall etching, and degrade the str...

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Detalhes bibliográficos
Publicado no:Nanoscale Res Lett
Main Authors: Chien, Pin-Ju, Wei, Ta-Cheng, Chen, Chia-Yun
Formato: Artigo
Idioma:Inglês
Publicado em: Springer US 2020
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC6990330/
https://ncbi.nlm.nih.gov/pubmed/32002703
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/s11671-020-3259-5
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