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Dual-Level Capacitive Micromachined Uncooled Thermal Detector
This paper presents a novel dual-level capacitive microcantilever-based thermal detector that is implemented in the commercial surface micromachined PolyMUMPs technology. The proposed design is implemented side-by-side with four different single-level designs to enable a design-to-design performance...
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| Pubblicato in: | Sensors (Basel) |
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| Autori principali: | , , , |
| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
MDPI
2019
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| Soggetti: | |
| Accesso online: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6961019/ https://ncbi.nlm.nih.gov/pubmed/31835469 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s19245434 |
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