Design and Fabrication of Multi-Frequency and Low-Quality-Factor Capacitive Micromachined Ultrasonic Transducers

Capacitive micromachined ultrasonic transducers (CMUTs) have been developed for air-coupled applications to address key challenges such as noise, prolonged ringing, and side-lobe interference. This study introduces an optimized CMUT design that leverages the squeeze-film damping effect to achieve a...

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Detalles Bibliográficos

Principais autores:	Amirhossein Moshrefi, Abid Ali, Mathieu Gratuze, Frederic Nabki
Formato:	Artigo
Idioma:	Inglês
Publicado:	MDPI AG 2025-07-01
Series:	Micromachines
Assuntos:	ultrasonic sensor quality factor optimization array design CMUT MEMS
Acceso en liña:	https://www.mdpi.com/2072-666X/16/7/797
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