Fabrication technology of capacitive micromachined ultrasonic transducers (CMUTs): A review

Capacitive micromachined ultrasonic transducers (CMUTs) have become an important research topic in ultrasonic applications and are already used across many fields. Their development is inseparable from the support of advanced fabrication technologies. Through rigorous surveying, scrutiny, and percep...

Ausführliche Beschreibung

Bibliografische Detailangaben

Hauptverfasser:	Qi Ding, Hongliang Wang, Tao Liu, Feng Zhang, Runze Yang, Guojun Zhang, Wendong Zhang
Format:	Artigo
Sprache:	Inglês
Veröffentlicht:	Elsevier 2026-01-01
Schriftenreihe:	Materials & Design
Schlagworte:	Capacitive micromachined ultrasonic transducers (CMUTs) Fabrication technology Sacrificial-release process Wafer-bonding process PolyMUMPs process One-stop reference guide
Online-Zugang:	http://www.sciencedirect.com/science/article/pii/S0264127525017812
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