Fabrication technology of capacitive micromachined ultrasonic transducers (CMUTs): A review

Capacitive micromachined ultrasonic transducers (CMUTs) have become an important research topic in ultrasonic applications and are already used across many fields. Their development is inseparable from the support of advanced fabrication technologies. Through rigorous surveying, scrutiny, and percep...

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Detalhes bibliográficos

Principais autores:	Qi Ding, Hongliang Wang, Tao Liu, Feng Zhang, Runze Yang, Guojun Zhang, Wendong Zhang
Formato:	Artigo
Idioma:	Inglês
Publicado em:	Elsevier 2026-01-01
coleção:	Materials & Design
Assuntos:	Capacitive micromachined ultrasonic transducers (CMUTs) Fabrication technology Sacrificial-release process Wafer-bonding process PolyMUMPs process One-stop reference guide
Acesso em linha:	http://www.sciencedirect.com/science/article/pii/S0264127525017812
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