Загрузка...
Dual-Level Capacitive Micromachined Uncooled Thermal Detector
This paper presents a novel dual-level capacitive microcantilever-based thermal detector that is implemented in the commercial surface micromachined PolyMUMPs technology. The proposed design is implemented side-by-side with four different single-level designs to enable a design-to-design performance...
Сохранить в:
| Опубликовано в: : | Sensors (Basel) |
|---|---|
| Главные авторы: | , , , |
| Формат: | Artigo |
| Язык: | Inglês |
| Опубликовано: |
MDPI
2019
|
| Предметы: | |
| Online-ссылка: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6961019/ https://ncbi.nlm.nih.gov/pubmed/31835469 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s19245434 |
| Метки: |
Добавить метку
Нет меток, Требуется 1-ая метка записи!
|