Investigation of AlGaN/GaN Heterostructures Grown on Sputtered AlN Templates with Different Nucleation Layers

In this work, a sputtered AlN template is employed to grow high-quality AlGaN/GaN heterostructures, and the effects of AlN nucleation layer growth conditions on the structural and electrical properties of heterostructures are investigated in detail. The optimal growth condition is obtained with comp...

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Bibliographic Details
Published in:Materials (Basel)
Main Authors: Liu, Chuan-Yang, Zhang, Ya-Chao, Xu, Sheng-Rui, Jiang, Li, Zhang, Jin-Cheng, Hao, Yue
Format: Artigo
Language:Inglês
Published: MDPI 2019
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Article
Online Access:https://ncbi.nlm.nih.gov/pmc/articles/PMC6947395/
https://ncbi.nlm.nih.gov/pubmed/31817364
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/ma12244050
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