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Resonant Pressure Micro Sensors Based on Dual Double Ended Tuning Fork Resonators
This paper presents resonant pressure micro sensors based on dual double ended tuning fork (DETF) resonators, which are electrostatically excited and piezoresistively detected. In operation, the barometric pressure under measurement bends the pressure sensitive diaphragm functioning as the anchor of...
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| 發表在: | Micromachines (Basel) |
|---|---|
| Main Authors: | , , , , , , , , |
| 格式: | Artigo |
| 語言: | Inglês |
| 出版: |
MDPI
2019
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| 主題: | |
| 在線閱讀: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6780867/ https://ncbi.nlm.nih.gov/pubmed/31450871 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi10090560 |
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