ロード中...

A Temperature-Insensitive Resonant Pressure Micro Sensor Based on Silicon-on-Glass Vacuum Packaging

This paper presents a temperature-insensitive resonant pressure sensor, which is mainly composed of a silicon-on-insulator (SOI) wafer for pressure measurements and a silicon-on-glass (SOG) cap for vacuum packaging. The variations of pressure under measurement bend the pressure sensitive diaphragm a...

詳細記述

保存先:
書誌詳細
出版年:Sensors (Basel)
主要な著者: Yan, Pengcheng, Lu, Yulan, Xiang, Chao, Wang, Junbo, Chen, Deyong, Chen, Jian
フォーマット: Artigo
言語:Inglês
出版事項: MDPI 2019
主題:
オンライン・アクセス:https://ncbi.nlm.nih.gov/pmc/articles/PMC6767015/
https://ncbi.nlm.nih.gov/pubmed/31500306
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s19183866
タグ: タグ追加
タグなし, このレコードへの初めてのタグを付けませんか!