A carregar...
Resonant Pressure Micro Sensors Based on Dual Double Ended Tuning Fork Resonators
This paper presents resonant pressure micro sensors based on dual double ended tuning fork (DETF) resonators, which are electrostatically excited and piezoresistively detected. In operation, the barometric pressure under measurement bends the pressure sensitive diaphragm functioning as the anchor of...
Na minha lista:
| Publicado no: | Micromachines (Basel) |
|---|---|
| Main Authors: | , , , , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2019
|
| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6780867/ https://ncbi.nlm.nih.gov/pubmed/31450871 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi10090560 |
| Tags: |
Adicionar Tag
Sem tags, seja o primeiro a adicionar uma tag!
|