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Resonant Pressure Micro Sensors Based on Dual Double Ended Tuning Fork Resonators
This paper presents resonant pressure micro sensors based on dual double ended tuning fork (DETF) resonators, which are electrostatically excited and piezoresistively detected. In operation, the barometric pressure under measurement bends the pressure sensitive diaphragm functioning as the anchor of...
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| 出版年: | Micromachines (Basel) |
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| 主要な著者: | , , , , , , , , |
| フォーマット: | Artigo |
| 言語: | Inglês |
| 出版事項: |
MDPI
2019
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| 主題: | |
| オンライン･アクセス: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6780867/ https://ncbi.nlm.nih.gov/pubmed/31450871 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi10090560 |
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