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Resonant Pressure Micro Sensors Based on Dual Double Ended Tuning Fork Resonators
This paper presents resonant pressure micro sensors based on dual double ended tuning fork (DETF) resonators, which are electrostatically excited and piezoresistively detected. In operation, the barometric pressure under measurement bends the pressure sensitive diaphragm functioning as the anchor of...
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| Vydáno v: | Micromachines (Basel) |
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| Hlavní autoři: | , , , , , , , , |
| Médium: | Artigo |
| Jazyk: | Inglês |
| Vydáno: |
MDPI
2019
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| Témata: | |
| On-line přístup: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6780867/ https://ncbi.nlm.nih.gov/pubmed/31450871 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi10090560 |
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