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Microelectromechanical System-Based Electrochemical Seismometers with Two Pairs of Electrodes Integrated on One Chip

This paper presents microelectromechanical system (MEMS)-based electrochemical seismometers with two pairs of electrodes integrated on one chip. Both theoretical analysis and numerical simulations were conducted to reveal the working principle of the proposed electrochemical seismometers, finding th...

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Detaylı Bibliyografya
Yayımlandı:Sensors (Basel)
Asıl Yazarlar: Zheng, Xichen, Chen, Deyong, Wang, Junbo, Chen, Jian, Xu, Chao, Qi, Wenjie, Liu, Bowen
Materyal Türü: Artigo
Dil:Inglês
Baskı/Yayın Bilgisi: MDPI 2019
Konular:
Online Erişim:https://ncbi.nlm.nih.gov/pmc/articles/PMC6767337/
https://ncbi.nlm.nih.gov/pubmed/31540211
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s19183953
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