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MEMS-Based Electrochemical Seismometer Relying on a CAC Integrated Three-Electrode Structure
This study developed a MEMS-based electrochemical seismometer relying on a cathode–anode–cathode (CAC) integrated three-electrode structure where two cathodes were positioned on two surfaces of a silicon wafer, while one anode was positioned on the sidewalls of the through holes of the silicon wafer...
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| Vydáno v: | Sensors (Basel) |
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| Hlavní autoři: | , , , , , , , |
| Médium: | Artigo |
| Jazyk: | Inglês |
| Vydáno: |
MDPI
2021
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| Témata: | |
| On-line přístup: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7865234/ https://ncbi.nlm.nih.gov/pubmed/33530375 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s21030809 |
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