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Temperature Compensation of the MEMS-Based Electrochemical Seismic Sensors
Electrochemical seismic sensors that employ liquid as their inertial masses have the advantages of high performances in the low-frequency domain and a large working inclination. However, the surrounding temperature changes have serious impacts on the sensitivities of the sensors, which makes them un...
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| Udgivet i: | Micromachines (Basel) |
|---|---|
| Main Authors: | , , , , , , , |
| Format: | Artigo |
| Sprog: | Inglês |
| Udgivet: |
MDPI
2021
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| Fag: | |
| Online adgang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC8066024/ https://ncbi.nlm.nih.gov/pubmed/33918243 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi12040387 |
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