MEMS-Based Electrochemical Seismometer with a Sensing Unit Integrating Four Electrodes

This paper presents a new process to fabricate a sensing unit of electrochemical seismometers using only one silicon–glass–silicon bonded wafer. By integrating four electrodes on one silicon–glass–silicon bonded wafer, the consistency of the developed sensing unit was greatly improved, benefiting fr...

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Bibliografiske detaljer
Udgivet i:Micromachines (Basel)
Main Authors: Qi, Wenjie, Xu, Chao, Liu, Bowen, She, Xu, Liang, Tian, Chen, Deyong, Wang, Junbo, Chen, Jian
Format: Artigo
Sprog:Inglês
Udgivet: MDPI 2021
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Article
Online adgang:https://ncbi.nlm.nih.gov/pmc/articles/PMC8232786/
https://ncbi.nlm.nih.gov/pubmed/34203906
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi12060699
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