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A Flexible Sensing Unit Manufacturing Method of Electrochemical Seismic Sensor

This paper presents an electrochemical seismic sensor in which paraylene was used as a substrate and insulating layer of micro-fabricated electrodes, enabling the detection of seismic signals with enhanced sensitivities in comparison to silicon-based counterparts. Based on microfabrication, paralene...

Disgrifiad llawn

Wedi'i Gadw mewn:
Manylion Llyfryddiaeth
Cyhoeddwyd yn:Sensors (Basel)
Prif Awduron: Li, Guanglei, Sun, Zhenyuan, Wang, Junbo, Chen, Deyong, Chen, Jian, Chen, Lianhong, Xu, Chao, Qi, Wenjie, Zheng, Yu
Fformat: Artigo
Iaith:Inglês
Cyhoeddwyd: MDPI 2018
Pynciau:
Mynediad Ar-lein:https://ncbi.nlm.nih.gov/pmc/articles/PMC5948934/
https://ncbi.nlm.nih.gov/pubmed/29641455
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s18041165
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