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A Flexible Sensing Unit Manufacturing Method of Electrochemical Seismic Sensor
This paper presents an electrochemical seismic sensor in which paraylene was used as a substrate and insulating layer of micro-fabricated electrodes, enabling the detection of seismic signals with enhanced sensitivities in comparison to silicon-based counterparts. Based on microfabrication, paralene...
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| Publicado en: | Sensors (Basel) |
|---|---|
| Main Authors: | , , , , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
MDPI
2018
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| Assuntos: | |
| Acceso en liña: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5948934/ https://ncbi.nlm.nih.gov/pubmed/29641455 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s18041165 |
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