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Scaled-Down c-Si and c-SiGe Wagon-Wheels for the Visualization of the Anisotropy and Selectivity of Wet-Chemical Etchants

Wet etching offers an advantage as a soft, damage-less method to remove sacrificial material with close to nanometer precision which has become critical for the fabrication of nanoscale structures. In order to develop such wet etching solutions, screening of etchant properties like selectivity and (...

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Detalhes bibliográficos
Publicado no:Nanoscale Res Lett
Main Authors: Pacco, Antoine, Tao, Zheng, Rip, Jens, van Dorp, Dennis, Philipsen, Harold, Holsteyns, Frank
Formato: Artigo
Idioma:Inglês
Publicado em: Springer US 2019
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC6701794/
https://ncbi.nlm.nih.gov/pubmed/31428955
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/s11671-019-3114-8
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