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Formation of Nanopits in Si Capping Layers on SiGe Quantum Dots
In-situ annealing at a high temperature of 640°C was performed for a low temperature grown Si capping layer, which was grown at 300°C on SiGe self-assembled quantum dots with a thickness of 50 nm. Square nanopits, with a depth of about 8 nm and boundaries along 〈110〉, are formed in the Si capping la...
में बचाया:
मुख्य लेखकों: | , , , , , , |
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स्वरूप: | Artigo |
भाषा: | Inglês |
प्रकाशित: |
Springer
2010
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विषय: | |
ऑनलाइन पहुंच: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3212206/ https://ncbi.nlm.nih.gov/pubmed/27502681 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1007/s11671-010-9811-y |
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