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Selection of UV Resins for Nanostructured Molds for Thermal-NIL
Nanoimprint molds made of soft polymeric materials have advantages of low demolding force and low fabrication cost over Si or metal-based hard molds. However, such advantages are often sacrificed by their reduced replication fidelity associated with the low mechanical strength. In this paper, we stu...
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| Publicat a: | Nanotechnology |
|---|---|
| Autors principals: | , , |
| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
2018
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| Matèries: | |
| Accés en línia: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6532406/ https://ncbi.nlm.nih.gov/pubmed/29911991 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1088/1361-6528/aacd33 |
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