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Fabrication of polymeric dual-scale nanoimprint molds using a polymer stencil membrane
We report on a simple and effective process that allows fabricating polymeric dual-scale nanoimprinting molds. The key for the process is the use of a thin flexible SU-8 stencil membrane, which was fabricated by either photolithography or thermal nanoimprint lithography (NIL). The stencil membrane w...
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| Vydáno v: | Microelectron Eng |
|---|---|
| Hlavní autoři: | , , |
| Médium: | Artigo |
| Jazyk: | Inglês |
| Vydáno: |
2018
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| Témata: | |
| On-line přístup: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6474418/ https://ncbi.nlm.nih.gov/pubmed/31011235 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1016/j.mee.2018.07.009 |
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