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The role of hydrophobic silane coating on Si stamps in nanoimprint lithography
Hydrophobic silane coatings have been successfully applied to the surface of Si stamps to improve demolding in nanoimprint lithography (NIL). However, the role of the silane coating has only been studied either indirectly, by measuring adhesion or friction coefficients for Si and substrate surfaces...
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| Yayımlandı: | J Appl Phys |
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| Asıl Yazarlar: | , , , , , |
| Materyal Türü: | Artigo |
| Dil: | Inglês |
| Baskı/Yayın Bilgisi: |
AIP Publishing LLC
2017
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| Konular: | |
| Online Erişim: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5881421/ https://ncbi.nlm.nih.gov/pubmed/29632415 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1063/1.4974533 |
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