Laddar...
Nanoimprint lithography for nanodevice fabrication
Nanoimprint lithography (NIL) is a compelling technique for low cost nanoscale device fabrication. The precise and repeatable replication of nanoscale patterns from a single high resolution patterning step makes the NIL technique much more versatile than other expensive techniques such as e-beam or...
Sparad:
| I publikationen: | Nano Converg |
|---|---|
| Huvudupphovsmän: | , |
| Materialtyp: | Artigo |
| Språk: | Inglês |
| Publicerad: |
Korea Nano Technology Research Society
2016
|
| Ämnen: | |
| Länkar: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5271567/ https://ncbi.nlm.nih.gov/pubmed/28191431 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/s40580-016-0081-y |
| Taggar: |
Lägg till en tagg
Inga taggar, Lägg till första taggen!
|