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Fabrication of flexible UV nanoimprint mold with fluorinated polymer-coated PET film
UV curing nanoimprint lithography is one of the most promising techniques for the fabrication of micro- to nano-sized patterns on various substrates with high throughput and a low production cost. The UV nanoimprint process requires a transparent template with micro- to nano-sized surface protrusion...
Gorde:
| Egile Nagusiak: | , , , , , |
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| Formatua: | Artigo |
| Hizkuntza: | Inglês |
| Argitaratua: |
Springer
2011
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| Gaiak: | |
| Sarrera elektronikoa: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3211878/ https://ncbi.nlm.nih.gov/pubmed/21767390 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-6-458 |
| Etiketak: |
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