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Fabrication of polydimethylsiloxane nanofluidic chips under AFM tip-based nanomilling process
In current research realm, polydimethylsiloxane (PDMS)-based nanofluidic devices are widely used in medical, chemical, and biological applications. In the present paper, a novel nanomilling technique (consisting of an AFM system and a piezoelectric actuator) was proposed to fabricate nanochannels (w...
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| Veröffentlicht in: | Nanoscale Res Lett |
|---|---|
| Hauptverfasser: | , , , , |
| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
Springer US
2019
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| Schlagworte: | |
| Online Zugang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6470239/ https://ncbi.nlm.nih.gov/pubmed/30997583 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/s11671-019-2962-6 |
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