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Fabrication of Nanoscale Pits with High Throughput on Polymer Thin Film Using AFM Tip-Based Dynamic Plowing Lithography

We show that an atomic force microscope (AFM) tip-based dynamic plowing lithography (DPL) approach can be used to fabricate nanoscale pits with high throughput. The method relies on scratching with a relatively large speed over a sample surface in tapping mode, which is responsible for the separatio...

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Détails bibliographiques
Publié dans:Nanoscale Res Lett
Auteurs principaux: He, Yang, Geng, Yanquan, Yan, Yongda, Luo, Xichun
Format: Artigo
Langue:Inglês
Publié: Springer US 2017
Sujets:
Accès en ligne:https://ncbi.nlm.nih.gov/pmc/articles/PMC5610139/
https://ncbi.nlm.nih.gov/pubmed/28940164
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/s11671-017-2319-y
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