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Fabrication of polydimethylsiloxane nanofluidic chips under AFM tip-based nanomilling process

In current research realm, polydimethylsiloxane (PDMS)-based nanofluidic devices are widely used in medical, chemical, and biological applications. In the present paper, a novel nanomilling technique (consisting of an AFM system and a piezoelectric actuator) was proposed to fabricate nanochannels (w...

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Publicat a:Nanoscale Res Lett
Autors principals: Wang, Jiqiang, Yan, Yongda, Geng, Yanquan, Gan, Yang, Fang, Zhuo
Format: Artigo
Idioma:Inglês
Publicat: Springer US 2019
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Accés en línia:https://ncbi.nlm.nih.gov/pmc/articles/PMC6470239/
https://ncbi.nlm.nih.gov/pubmed/30997583
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/s11671-019-2962-6
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