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Qualitative Identification of the Static Pull-In and Fundamental Frequency of One-Electrode MEMS Resonators
This paper attempts to qualitatively identify the static pull-in position, pull-in voltage, and fundamental frequency of one-electrode microresonators from a physical perspective. During theoretical derivation, a generalized one-degree-of-freedom (1-DOF) model in nondimensional form derived using th...
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| Pubblicato in: | Micromachines (Basel) |
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| Autori principali: | , , , , , , |
| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
MDPI
2018
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| Soggetti: | |
| Accesso online: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6316786/ https://ncbi.nlm.nih.gov/pubmed/30469544 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi9120614 |
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