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Vibration Identification of Folded-MEMS Comb Drive Resonators
Natural frequency and frequency response are two important indicators for the performances of resonant microelectromechanical systems (MEMS) devices. This paper analytically and numerically investigates the vibration identification of the primary resonance of one type of folded-MEMS comb drive reson...
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| Publicado no: | Micromachines (Basel) |
|---|---|
| Main Authors: | , , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2018
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6187744/ https://ncbi.nlm.nih.gov/pubmed/30424314 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi9080381 |
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