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On the Lateral Instability Analysis of MEMS Comb-Drive Electrostatic Transducers

This paper investigates the lateral pull-in effect of an in-plane overlap-varying transducer. The instability is induced by the translational and rotational displacements. Based on the principle of virtual work, the equilibrium conditions of force and moment in lateral directions are derived. The an...

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Detaylı Bibliyografya
Yayımlandı:Sensors (Basel)
Asıl Yazarlar: Truong, Binh Duc, Le, Cuong Phu, Halvorsen, Einar
Materyal Türü: Artigo
Dil:Inglês
Baskı/Yayın Bilgisi: MDPI 2019
Konular:
Online Erişim:https://ncbi.nlm.nih.gov/pmc/articles/PMC6749348/
https://ncbi.nlm.nih.gov/pubmed/31480388
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s19173770
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