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Vibration Identification of Folded-MEMS Comb Drive Resonators
Natural frequency and frequency response are two important indicators for the performances of resonant microelectromechanical systems (MEMS) devices. This paper analytically and numerically investigates the vibration identification of the primary resonance of one type of folded-MEMS comb drive reson...
Gorde:
| Argitaratua izan da: | Micromachines (Basel) |
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| Egile Nagusiak: | , , , , , , |
| Formatua: | Artigo |
| Hizkuntza: | Inglês |
| Argitaratua: |
MDPI
2018
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| Gaiak: | |
| Sarrera elektronikoa: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6187744/ https://ncbi.nlm.nih.gov/pubmed/30424314 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi9080381 |
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