Llwytho...
Static and Dynamic Mechanical Behaviors of Electrostatic MEMS Resonator with Surface Processing Error
The micro-electro-mechanical system (MEMS) resonator developed based on surface processing technology usually changes the section shape either due to excessive etching or insufficient etching. In this paper, a section parameter is proposed to describe the microbeam changes in the upper and lower sec...
Wedi'i Gadw mewn:
| Cyhoeddwyd yn: | Micromachines (Basel) |
|---|---|
| Prif Awduron: | , , , |
| Fformat: | Artigo |
| Iaith: | Inglês |
| Cyhoeddwyd: |
MDPI
2018
|
| Pynciau: | |
| Mynediad Ar-lein: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6187238/ https://ncbi.nlm.nih.gov/pubmed/30393310 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi9010034 |
| Tagiau: |
Ychwanegu Tag
Dim Tagiau, Byddwch y cyntaf i dagio'r cofnod hwn!
|