A carregar...
Analysis of Frequency Drift of Silicon MEMS Resonator with Temperature
High-quality-factor Micro-Electro-Mechanical System (MEMS) resonators have been widely used in sensors and actuators to obtain great mechanical sensitivity. The frequency drift of resonator with temperature is a problem encountered practically. The paper focuses on the resonator frequency distributi...
Na minha lista:
| Publicado no: | Micromachines (Basel) |
|---|---|
| Main Authors: | , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2020
|
| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7823883/ https://ncbi.nlm.nih.gov/pubmed/33383860 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi12010026 |
| Tags: |
Adicionar Tag
Sem tags, seja o primeiro a adicionar uma tag!
|