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Analysis of Frequency Drift of Silicon MEMS Resonator with Temperature
High-quality-factor Micro-Electro-Mechanical System (MEMS) resonators have been widely used in sensors and actuators to obtain great mechanical sensitivity. The frequency drift of resonator with temperature is a problem encountered practically. The paper focuses on the resonator frequency distributi...
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| Publicado en: | Micromachines (Basel) |
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| Autores principales: | , , , |
| Formato: | Artigo |
| Lenguaje: | Inglês |
| Publicado: |
MDPI
2020
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| Materias: | |
| Acceso en línea: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7823883/ https://ncbi.nlm.nih.gov/pubmed/33383860 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi12010026 |
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