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An ultra-stable MEMS resonator with ±14 ppb frequency stability realized by nonlinearity-mediated drift suppression

Abstract Silicon-based MEMS resonators have shown promising potential to replace quartz crystal resonators in many fields, especially in realizing precise timing. However, the large temperature-dependent properties of single-crystal silicon render the MEMS resonators suffer from severe degradation i...

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Bibliografiske detaljer
Main Authors: Yutao Xu, Chun Wang, Junsheng Lv, Gang Shao, Xueyong Wei
Format: Artigo
Sprog:Inglês
Udgivet: Nature Publishing Group 2025-09-01
Serier:Microsystems & Nanoengineering
Online adgang:https://doi.org/10.1038/s41378-025-01025-y
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