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An ultra-stable MEMS resonator with ±14 ppb frequency stability realized by nonlinearity-mediated drift suppression
Abstract Silicon-based MEMS resonators have shown promising potential to replace quartz crystal resonators in many fields, especially in realizing precise timing. However, the large temperature-dependent properties of single-crystal silicon render the MEMS resonators suffer from severe degradation i...
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| Main Authors: | , , , , |
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| Format: | Artigo |
| Sprog: | Inglês |
| Udgivet: |
Nature Publishing Group
2025-09-01
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| Serier: | Microsystems & Nanoengineering |
| Online adgang: | https://doi.org/10.1038/s41378-025-01025-y |
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