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Analysis of Frequency Stability and Thermoelastic Effects for Slotted Tuning Fork MEMS Resonators
MicroElectroMechanical Systems (MEMS) resonators are attracting increasing interest because of their smaller size and better integrability as opposed to their quartz counterparts. However, thermal drift of the natural frequency of silicon structures is one of the main issues that has hindered the de...
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| Publicado no: | Sensors (Basel) |
|---|---|
| Main Authors: | , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2018
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6068836/ https://ncbi.nlm.nih.gov/pubmed/29973566 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s18072157 |
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