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Vibration-Induced Errors in MEMS Tuning Fork Gyroscopes with Imbalance

This paper discusses the vibration-induced error in non-ideal MEMS tuning fork gyroscopes (TFGs). Ideal TFGs which are thought to be immune to vibrations do not exist, and imbalance between two gyros of TFGs is an inevitable phenomenon. Three types of fabrication imperfections (i.e., stiffness imbal...

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Dettagli Bibliografici
Pubblicato in:Sensors (Basel)
Autori principali: Fang, Xiang, Dong, Linxi, Zhao, Wen-Sheng, Yan, Haixia, Teh, Kwok Siong, Wang, Gaofeng
Natura: Artigo
Lingua:Inglês
Pubblicazione: MDPI 2018
Soggetti:
Accesso online:https://ncbi.nlm.nih.gov/pmc/articles/PMC6022183/
https://ncbi.nlm.nih.gov/pubmed/29844301
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s18061755
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