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Vibration-Induced Errors in MEMS Tuning Fork Gyroscopes with Imbalance

This paper discusses the vibration-induced error in non-ideal MEMS tuning fork gyroscopes (TFGs). Ideal TFGs which are thought to be immune to vibrations do not exist, and imbalance between two gyros of TFGs is an inevitable phenomenon. Three types of fabrication imperfections (i.e., stiffness imbal...

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Detalhes bibliográficos
Publicado no:Sensors (Basel)
Main Authors: Fang, Xiang, Dong, Linxi, Zhao, Wen-Sheng, Yan, Haixia, Teh, Kwok Siong, Wang, Gaofeng
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2018
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC6022183/
https://ncbi.nlm.nih.gov/pubmed/29844301
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s18061755
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