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Vibration-Induced Errors in MEMS Tuning Fork Gyroscopes with Imbalance
This paper discusses the vibration-induced error in non-ideal MEMS tuning fork gyroscopes (TFGs). Ideal TFGs which are thought to be immune to vibrations do not exist, and imbalance between two gyros of TFGs is an inevitable phenomenon. Three types of fabrication imperfections (i.e., stiffness imbal...
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| Veröffentlicht in: | Sensors (Basel) |
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| Hauptverfasser: | , , , , , |
| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
MDPI
2018
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| Schlagworte: | |
| Online Zugang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6022183/ https://ncbi.nlm.nih.gov/pubmed/29844301 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s18061755 |
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