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Design and Vibration Sensitivity Analysis of a MEMS Tuning Fork Gyroscope with an Anchored Diamond Coupling Mechanism
In this paper, a new micromachined tuning fork gyroscope (TFG) with an anchored diamond coupling mechanism is proposed while the mode ordering and the vibration sensitivity are also investigated. The sense-mode of the proposed TFG was optimized through use of an anchored diamond coupling spring, whi...
Gorde:
| Argitaratua izan da: | Sensors (Basel) |
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| Egile Nagusiak: | , , , , |
| Formatua: | Artigo |
| Hizkuntza: | Inglês |
| Argitaratua: |
MDPI
2016
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| Gaiak: | |
| Sarrera elektronikoa: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4850982/ https://ncbi.nlm.nih.gov/pubmed/27049385 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s16040468 |
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