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Videometrics-based Detection of Vibration Linearity in MEMS Gyroscope
MEMS gyroscope performs as a sort of sensor to detect angular velocity, with diverse applications in engineering including vehicle and intelligent traffic etc. A balanced vibration of driving module excited by electrostatic driving signal is the base MEMS gyroscope's performance. In order to an...
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| Main Authors: | , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Springer
2011-05-01
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| Colecção: | International Journal of Computational Intelligence Systems |
| Assuntos: | |
| Acesso em linha: | https://www.atlantis-press.com/article/2162.pdf |
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