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Integrated Temperature and Hydrogen Sensors with MEMS Technology
In this work, a PdNi thin film hydrogen gas sensor with integrated Pt thin film temperature sensor was designed and fabricated using the micro-electro-mechanical system (MEMS) process. The integrated sensors consist of two resistors: the former, based on Pt film, is used as a temperature sensor, whi...
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| Veröffentlicht in: | Sensors (Basel) |
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| Hauptverfasser: | , , , , , , , , |
| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
MDPI
2017
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| Schlagworte: | |
| Online Zugang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5795469/ https://ncbi.nlm.nih.gov/pubmed/29301220 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s18010094 |
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