A carregar...
Integrated Temperature and Hydrogen Sensors with MEMS Technology
In this work, a PdNi thin film hydrogen gas sensor with integrated Pt thin film temperature sensor was designed and fabricated using the micro-electro-mechanical system (MEMS) process. The integrated sensors consist of two resistors: the former, based on Pt film, is used as a temperature sensor, whi...
Na minha lista:
| Publicado no: | Sensors (Basel) |
|---|---|
| Main Authors: | , , , , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2017
|
| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5795469/ https://ncbi.nlm.nih.gov/pubmed/29301220 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s18010094 |
| Tags: |
Adicionar Tag
Sem tags, seja o primeiro a adicionar uma tag!
|