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Low Concentration Response Hydrogen Sensors Based on Wheatstone Bridge
The PdNi film hydrogen sensors with Wheatstone bridge structure were designed and fabricated with the micro-electro-mechanical system (MEMS) technology. The integrated sensors consisted of four PdNi alloy film resistors. The internal two were shielded with silicon nitride film and used as reference...
Shranjeno v:
| izdano v: | Sensors (Basel) |
|---|---|
| Main Authors: | , , , , , , , |
| Format: | Artigo |
| Jezik: | Inglês |
| Izdano: |
MDPI
2019
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| Teme: | |
| Online dostop: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6427178/ https://ncbi.nlm.nih.gov/pubmed/30836675 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s19051096 |
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