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Integrated Temperature and Hydrogen Sensors with MEMS Technology

In this work, a PdNi thin film hydrogen gas sensor with integrated Pt thin film temperature sensor was designed and fabricated using the micro-electro-mechanical system (MEMS) process. The integrated sensors consist of two resistors: the former, based on Pt film, is used as a temperature sensor, whi...

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Bibliografiske detaljer
Udgivet i:Sensors (Basel)
Main Authors: Jiang, Hongchuan, Huang, Min, Yu, Yibing, Tian, Xiaoyu, Zhao, Xiaohui, Zhang, Wanli, Zhang, Jianfeng, Huang, Yifan, Yu, Kun
Format: Artigo
Sprog:Inglês
Udgivet: MDPI 2017
Fag:
Online adgang:https://ncbi.nlm.nih.gov/pmc/articles/PMC5795469/
https://ncbi.nlm.nih.gov/pubmed/29301220
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s18010094
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