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Profilometry of thin films on rough substrates by Raman spectroscopy
Thin, light-absorbing films attenuate the Raman signal of underlying substrates. In this article, we exploit this phenomenon to develop a contactless thickness profiling method for thin films deposited on rough substrates. We demonstrate this technique by probing profiles of thin amorphous silicon s...
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| Veröffentlicht in: | Sci Rep |
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| Hauptverfasser: | , , , , , , , , |
| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
Nature Publishing Group
2016
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| Schlagworte: | |
| Online Zugang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5138622/ https://ncbi.nlm.nih.gov/pubmed/27922033 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/srep37859 |
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