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Comparison of Electron Imaging Modes for Dimensional Measurements in the Scanning Electron Microscope()
Dimensional measurements from secondary electron (SE) images were compared with those from backscattered electron (BSE) and low-loss electron (LLE) images. With the commonly used 50% threshold criterion, the lines consistently appeared larger in the SE images. As the images were acquired simultaneou...
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| Pubblicato in: | Microsc Microanal |
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| Autori principali: | , , , |
| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
2016
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| Soggetti: | |
| Accesso online: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5113026/ https://ncbi.nlm.nih.gov/pubmed/27452278 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1017/S1431927616011430 |
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